SDE Series

Apply screw type rotor with higher performance against by-product. High corrosion resistance from structural materials and temperature control.

Harsh Process Application Example

Harsh Process Application Example

Lineup by Max. Pumping Speed

Lineup by Pumping Speed
Max. Pumping Speed[L/min]

Major Products

Spec. / ProductsSDE90XSDE120TXSDE200SDE303XSDE603XSDE1203TXSDE20N12TXSDE30N20SDE60N20
Max. pumping speed
[L/min] *1
Ultimate pressure
[Pa] *1
Supply voltage
3Phase AC200~220V, 380~480V
Power consumption [kW]*
Dimensions [mm]*3L690930900100010001080

*1) Without N2 purge. *2) Approx. value at ultimate pressure. *3) Package size.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice. * Contact us about applicable gas.

S-P Curve

S-P Curve
* S-P curves vary by combination.


Dry Pump temperature selection for each process. Select booster pump / pipe heating specification. Supplemental choice of foreline & exhaust-line against by-product. Operational status can be monitored by Centralized Monitoring System (CMS). The total exhaust system of which equipped with abatement(heater, plasma, or combustion model).
  1. Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice.
  2. Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department.
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