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Contents

SDE Series

Process Durability/Energy-Saving/High Capacity

Apply screw type rotor with higher performance against by-product.

SD Series

Inheritance and Evolution of Process Durability

35% smaller footprint than the other 20,000L/min pumps.

MU Series

Enhanced Highly Reliable Design and Improved Energy Efficiency

Compliant product specifications for various standards.

NeoDry G Series

Handy & Air Cooled Dry Pump

Typically 45dB (51dB for 36G) at ultimate pressure.

SDL Series

Available to large size wafer & FPD

Large capacity available by combination.

MU-X Series

Harsh Duty Process Application

The Durable, Long Lasting Dry Vacuum Pump for any Process Application.

MU-P/H Series

"More than" Low Power

Roots dry pump good in process durability and low power consumption.

NeoDry E Series

Handy & Air Cooled Dry Pump

Maintenance cycle; Once in 6 years! (Approx. when Air/N2 is used)
Kashiyama Taiwan, Co., Ltd.

Kashiyama Taiwan, Co., Ltd.

No.1-2, Keyuan 1st Road, Xitun Dist., Taichung City 40763, Taiwan
Tel:
04-2462-9599
Fax:
04-2462-9566
Copyright © 2025 Kashiyama Taiwan, Co., Ltd. All Rights Reserved.